Photoresponsive devices including a photoresponsive electrode are provided, and methods for their use to measure changes in environment at a site at or about the surface of the photoresponsive device. By employing a source of light for irradiating a site on the surface and means for biasing the photoresponsive electrode in relation to a counterelectrode, a variation in electrical signal can be related to a change in a medium in photoresponsive modulation relationship to the photoresponsive electrode surface.

Current U.S. Class:	204/403.01; 204/403.06; 204/403.08; 204/403.1; 204/403.11; 204/403.13; 204/403.14; 204/412; 204/606; 204/610; 324/71.5; 422/82.01; 422/82.02; 422/82.05; 435/29; 435/34; 435/39; 435/4; 435/7.32; 435/7.9; 435/817; 436/501; 436/806; 436/827
Current CPC Class:	G01N 27/3273 (20130101); B01J 2219/00605 (20130101); B01J 2219/00612 (20130101); B01J 2219/00626 (20130101); B01J 2219/00637 (20130101); B01J 2219/00659 (20130101); B01J 2219/00702 (20130101); Y10S 436/827 (20130101); Y10S 435/817 (20130101); Y10S 436/806 (20130101)
Current International Class:	G01N 27/416 (20060101); G01N 27/30 (20060101); G01N 021/27 (); G01N 027/07 ()
Field of Search:	;204/153.12,153.2,403,412 ;324/71.5 ;357/25 ;422/82.01,82.02,82.05 ;435/4,6,7,32,7,9,29,34,39,291,817,973 ;436/501,806,827

Banner & Allegtrtti, Ltd.

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Parent Case Text

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RELATED APPLICATIONS

This is a continuation of application Ser. No. 07/664,365, filed Mar. 4, 1991, now abandoned, which is a divisional application of Ser. No. 07/231,091, filed Aug. 11, 1988, now abandoned, which is a continuation-in-part of U.S. patent application Ser. No. 07/073,763, filed Jul. 15, 1987, now abandoned, which is a continuation-in-part of Ser. No. 06/834,270, filed Feb. 27, 1985, now abandoned, which is a continuation-in-part of Ser. No. 06/597,135, filed Apr. 5, 1984, issued as U.S. Pat. No. 4,591,550, which in turn is a continuation-in-part of Ser. No. 06/585,334, filed Mar. 1, 1984, now abandoned.

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Claims

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What is claimed is:

1. A device for making a determination of one or more substances capable of affecting the photoresponsive characteristics of a photoresponsive element, said device comprising:

one or more photoresponsive elements each having one or more sample surfaces with one or more sample sites, each of said one or more photoresponsive elements having one or more irradiation-receiving surfaces with one or more irradiation sites, each said irradiation site being in close physical relationship with a certain one of said sample sites;

irradiation means for irradiating said one or more irradiation sites on said one or more photoresponsive elements to provide distinguishable signals from each of said one or more irradiation sites;

a counterelectrode;

means for applying a first electrical signal to said photoresponsive element and said counterelectrode;

means for retaining gas, liquid, or solid material in which said substances are to be determined in contact with said one or more sample surfaces such as to affect the photoresponsive characteristics of said photoresponsive elements;

insulating means for preventing the flow of a direct or faradaic current between said photoresponsive elements and said media; and

means for measuring a second electrical signal produced as a result of said first electrical signal and said irradiating of said photoresponsive elements, where said second electrical signal is capacitively coupled across said insulating means.

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Description

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BACKGROUND OF THE INVENTION

FIELD OF THE INVENTION

The detection of the presence of a material and/or its amount in a particular environment becomes increasingly important in a society which seeks to monitor and manipulate its environment. Despite the long history of developing devices for measurement of various materials in liquid media, there still remain ample opportunities for improvements in sensitivity, efficiency, economy, and ease of use. Among the manifold detection methods, one device which has found recent application is the field effect transistor (FET) and various modifications of the device. Various studies have been directed to the use of FETs for measurement of organic molecules. See for example, Stenberg etal., J. Coll. Interface and Sci. (1979) 73:255-264; Bergveld and DeRooij, Med. Biol. Eng. Compt. (1979) 17:647-654; Bergveld etal., IEEE Trans. BMI-23 (1976 pages 136-144; and Lauks and Zemel, IEEE Trans. on Electron Devices, Vol. ED-26, No. 12 (December 1979), pages 10959-10964. These references are merely illustrative of references directed to semiconductor devices, particularly field effect transistors, for measurement of materials in solution. The FET devices have not found commercial acceptance and, in many situations, lack flexibility. For use as chemical detectors, FET devices particularly suffer from the difficulty of obtaining exposed gate regions and working with them in an experimental environment.

As compared to other devices, semiconductive or other devices which respond to an electrical signal provide for a number of advantages. The electrically responsive device can respond to relatively small signals. Furthermore, by various techniques, the signal can be modulated and the background noise diminished or substantially eliminated. Electrical devices can frequently be miniaturized, so that relatively small equipment can be developed for measurement of changes in various fluids.

DESCRIPTION OF THE PRIOR ART

References of interest include Gronet and Lewis, Nature (1982) 300:733-735; Bard and Faulkner, 1980. Electrochemical Methods-Fundamentals and Applications, John Wiley and Sons, New York; Fahrenbruch and Bube, 1983. Fundamentals of Solar Cells--Photovoltaic Energy Conversion, Academic Press, New York; Fonash, 1981; Solar Cell Device Physics, Academic Press, New York; and Photoeffects at Semiconductor-Electrolyte Surfaces, ed. Nozik, American Chemical Society, Washington, D.C., 1981. See also U.S. Pat. No. 4,293,310 and PCT Application No. WO83/02669.

SUMMARY OF THE INVENTION

Photoresponsive sensing elements, circuits and methods are provided involving measuring electrical signals resulting from irradiation at one or more sites, where the signals vary in relation to the environment at each site. One or more sites on a photoresponsive surface are irradiated with light of a predetermined wavelength range to produce individually analyzable signals, where each of the signals is related to a medium volume associated with the irradiated site. The photoresponsive surface is polarized in relation to one or more counterelectrodes which is in an electrically transductive relationship through a medium with said photoresponsive surface.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a first exemplary circuit for use in the method of the invention;

FIG. 2 is a second exemplary circuit which provides for the automatic maintenance of the photosignal from a photoresponsive surface at a predetermined value;

FIG. 3 is a diagrammatic cross-sectional view of a photoresponsive device for sampling multiple compartments;

FIG. 4 is a diagrammatic view partially broken away of a manifold for use with the photoresponsive device;

FIG. 5 is a diagrammatic view of a photoresponsive device and an associated sample handling system.

FIG. 6 is a graph of relative concentration of dye in a medium versus voltage response upon irradiation of a photoresponsive surface through a solution of the dye;

FIG. 7 is a graph of observed voltage with varying redox compositions;

FIG. 8a through 8f are cross-sectional views depicting a fabrication sequence in accordance with one embodiment of this invention.

FIG. 9 is a diagram depicting one circuit suitable for use in accordance with the teachings of this invention;

FIG. 10 is a graph depicting the change in photocurrent with respect to changes in bias potential;

FIG. 11 is a graph depicting the second derivative of the curve of FIG. 10; and

FIG. 12 depicts an embodiment of this invention suitable for use with nonconductive media.

DESCRIPTION OF THE SPECIFIC EMBODIMENTS

In accordance with the subject invention, methods and devices are provided which allow for the simultaneous or substantially simultaneous determination of incremental portions of a medium. The device employs a photosensitive sensing element serving as an electrode electrically coupled through a signal analyzing circuit and an electrically communicating medium to at least one counterelectrode. Sites on the photosensitive surface are individually irradiated by light of a predetermined wavelength range, whereby the signals at such individual sites may be individually analyzed. The detectable signal at each of said sites will be related to the level of irradiation at each site and the state of the conduction band within the photosensitive sensing element as a result of the fluid medium adjacent the site on the photoresponsive surface.

The photoresponsive electrode is polarized in relation to at least one counterelectrode. The two electrodes are in electrically communicating relationship, where the medium providing the communicating relationship may be the same as or different from the medium to be analyzed. A circuit is employed which provides for polarizing the photoresponsive electrode through an electrically communicating medium, usually a polar fluid medium, e.g., an aqueous medium. Preferably, current flow through the electrically communicating medium is inhibited by a high quality electrical insulator on the surface of the photoresponsive element, thereby enhancing the physical stability of the sensing element surface, particularly with a silicon semiconductor. In order to determine the state of an incremental portion of a medium of interest, one irradiates a site in propinquity to said incremental portion and measures the resulting signal as compared to a standard.

The photoresponsive electrode or sensing element or electrode can be a semiconductive material or photoconductive material. Semiconductive materials include such materials as silicon, gallium arsenide, gallium selenide, aluminum gallium arsenide, or the like. The semiconductive material will be either of the p- or n-type and, as appropriate, may employ such dopants as boron, aluminum, phosphorus, arsenic, antimony, or the like. The degree of doping may be varied widely, there being a wide variety of commercially-available doped wafers which can be used. The concentration of the dopant will normally vary empirically to provide the desired photoresponse, frequently being a matter of convenience, and will generally range from about 10.sup.10 to 10.sup.20 atoms/cc; usually for silicon the rating will be about 5-20 ohm-cm. Photoconductive materials include chlorogallium phthalocyanine. Rieke and Armstrong, J. Am. Chem. Soc. (1984) 106:47-50.

Various electrical circuits may be used to measure changes in photoresponsiveness of the sensing element which result from changes in the state of an incremental portion of the medium. These electrical circuits may primarily measure changes in phototransductance which include photopotential, photoconductance, photocapacitance or photoinductance, or combinations thereof. The circuits will be chosen so as to provide maximal sensitivity for detecting small changes in the state of the medium. These measurements will be generally referred to as the photoresponse.

The observed signal from the circuit can be a result of a change in direct current, alternating current or the effect of a direct current on an alternating current.

Where wafers are used for the photoresponsive element, they may come in a variety of sizes and shapes, varying from chip size which may have its largest dimension of about 0.1 mm or wafer size which may be 100 mm, more usually not more than about 75 mm in its largest dimension. The element will usually have at least one smooth surface or smooth portion of a surface, desirably flat, which will serve as the sample surface. The wafer may be round, rectangular, elongate or the like. The thickness of the wafer will generally be not more than about 1 mm, usually less than about 2 mm, and generally not less than about 0.5 .mu., usually not less than 0.1 mm.

The sample medium normally will be in contact with the sample surface of the photoresponsive element. The sample surface will have an associated electrically insulating matrix. The matrix may include a coating of at least about 25 .ANG., more usually at least about 50 .ANG., which may be substantially larger, but usually not exceeding 10,000 .ANG., more usually not exceeding 1,500 .ANG.. For the most part, there will be a small amount of a protective oxide or nitride coating or other protective coating, e.g., silicon oxide or nitride.

Alternatively or in combination, the sample surface may be reacted with a wide variety of organic silanes, particularly halides or esters, which can provide for an organic coating of the surface. The organosilanes will have organogroups of from 1 to 30, more usually of from about 1 to 25 carbon atoms, which may be aliphatic, allcyclic, aromatic or heterocyclic, or combinations thereof, usually hydrocarbon, which may be aliphatically saturated or unsaturated or may be a substituted hydrocarbon having a polar terminus, which may be polar due to: 1) a charge, e.g., carboxylate, phosphate or ammonium; 2) a zwitterion, e.g., betaine; or 3) a dipole, e.g., 3,4-dinitrophenyl, carboxylate ester, phosphate triester, etc.

Where hydrocarbon groups are employed, particularly aliphatic groups of from about 6 to 24 carbon atoms, either saturated or unsaturated, a second layer may be employed to provide for a bilayer membrane. Any lipids may be used for preparing the second layer which provide a stable bilamellar membrane. Alternatively, lipids forming stable lamellar membranes may be employed for both layers, avoiding covalent bonding to the surface. Illustrative groups include phospholipids, sphingomyelins, gangliosides, cholesteric compounds, acylglycerols, waxes, and the like.

Conveniently, a polymerized lipid bilayer may be employed which may be preprepared and positioned on the sample surface. See, for example, Wegner, Chapter V, R. A. Welch Foundation Conf. on Chemical Research XXVI Synthetic Polymers, Nov. 15-17, 1982, Houston, Tex., which disclosure is incorporated herein by reference. Desirably, the degree of polymerization will be less than 100%, usually from about 20% to 90%, to allow for a substantial degree of fluidity and lateral diffusion. If desired, a first layer may also be employed under the polymerized layer.

Various other materials may be used in conjunction with the sample surface, which materials may be bound either covalently or non-covalently, or held mechanically in place adjacent to the surface. The materials may be naturally occurring, or synthetic or combinations thereof. These materials include porous films, generally of from about 1 to 50 mil in thickness, normally being polar materials such as nitrocellulose, partially hydrolyzed polyvinyl acetate, polyacrylates, proteins, polysaccharides, e.g., agarose, etc. Various gels may be used such as agar, polyacrylamide, or the like. These layers may have independent integrity or rely on the photoresponsive element for support. They will be in direct contact, in whole or in part, with the photoresponsive element, either directly or through intermediate layers.

Various other materials may also be associated with the photoresponsive electrode element, which materials will be described in more detail subsequently. Among these may be a confronting spaced apart layer, e.g., sheet or slide. Other materials may be present to provide for specific interactions, particularly complexation between specific binding materials. These materials may be bound directly or indirectly to the photoresponsive surface, particularly to the protective coating, or to the confronting layer.

The photoresponsive element will also have one or more irradiation-receiving surfaces. The sample surface and irradiation-receiving surface may be the same surface. If this is the case, any films or coatings or layers should not interfere with the transmission of light of the particular wavelength with which the irradiation-receiving surface is irradiated. Furthermore, a matrix at the sample surface may be required to allow for polar interactions as a result of ions or the binding or complexing of polar, particularly charged materials, e.g., proteins, lipids, neuraminic acids, or other charged saccharide, or the like. The matrix may be of any thickness, so long as it allows transmission of information concerning the state of the medium from a site at the sample surface to the photoresponsive material underneath. The medium employed at a site of the sample surface will usually allow for conductions of ions. Therefore, to the extent that solid films are employed, these will usually be porous and immersed in a liquid medium, so as to allow for the conduction of ions and molecules adjacent the sensing electrode surface to provide for electrical communication between the electrodes.

The device may have a single continuous photoresponsive element ranging from a total surface area of about 1 mm.sup.2 to about 50 cm.sup.2, more usually about 5 cm.sup.2, or in some instances may have a plurality of individual photoresponsive elements insulated from each other so as to provide for independent signals to the same circuit. The individual elements will usually range from about 0.1 mm.sup.2 to 1,000 mm.sup.2 or greater, the upper limit being primarily one of convenience, although in some situations an enhanced signal may be obtained by employing a large surface area. The sample surfaces of individual photoresponsive elements may be in contact with media which are partially isolated from each other by the presence of partitions which allow for electrical communication, for example, membranes, fritted walls, or partitions extending only a partial distance to the sample surface, conveniently 25% to 90% of the distance to the sample surface. Such partitions may also find use with a large photoresponsive element, as will be described subsequently.

The photoresponsive element surface may be divided up physically in a variety of ways, providing for compartments which may have any convenient periphery, circular, square or the like, channels which may be circular, serpentine or straight, or combinations thereof. Extended areas such as channels allow for inspection of a moving solution at different times. Channels can be provided by having grooves in the matrix associated with the photoresponsive element surface and compartments can be provided for by having indentations in the matrix associated with the photoresponsive element surface. The number of independent sample sites to be measured and irradiation-receiving sites to be irradiated may be 1 or more, usually being 5 or more, and may be 50 or more, and could be as high as 2500.

Alternatively, a facing solid film, layer or plate may be provided which provides for the appropriate structure, resulting in dividing the sample surface into compartments and/or channels. The facing surface is normally rigid and may be transparent, opaque, translucent, may be metal, ceramic, glass, or the like. Where translucent or opaque, in relation to the irradiation light, where the facing plate is adjacent to the irradiation-receiving surface, holes can be provided in the plate for transmission of the light at a variety of sites. Or, optical fibers may be employed for directing light through the plate to particular sites. The plate may be an inert material, merely providing structure, or can be modified by providing for binding of various materials to the surface. These materials would be involved in the determination of the state of an incremental portion of a medium so as to provide for individual sites which may be individually determined, allowing for the rapid determination of a plurality of results.

Irradiation of the photoresponsive element may be on either side of the wafer. However, where the irradiation-receiving surface occurs on the side of the photoresponsive element that is opposite to the side associated with the medium of interest, it will be necessary that the wafer be very thin so that the conductive band of the photoresponsive element which is influenced by the medium of interest can also be affected by the light irradiation. Normally, in this situation, the thickness of the photoresponsive element will be from about 0.05 .mu. to 2 mm.

The photoresponsive surface can be influenced by a variety of properties present in the incremental portion of a medium. One property is obviously light absorbence, where the medium may vary in the amount of light absorption. Thus, variations in concentration of a substance which absorbs light in the irradiating wavelength range and is present in the light beam can be detected and measured by the observed signal. In this instance, the incremental portion of the medium of interest may be adjacent or distant from the irradiated site on the photoresponsive surface. Thus, variations in light flux or intensity can be detected and used to measure the amount of an absorbing material of interest or the amount of the absorbing material related to a different material of interest.

Other phenomena which provide for a light flux include fluorescence or chemiluminescence. Therefore, irradiation of the photoconductive surface may come from a chemical rather than a physical source. The fluorescence can be as a result of excitation irradiation of a medium, containing a fluorescer, with appropriate light which upon fluorescence results in a light flux to which the photoresponsive element may respond, or a chemical reaction which provides for a fluorescent product by energy transfer. Alternatively, one may have chemiluminescence, where by a chemical reaction, a product is obtained which emits light, e.g., luciferass and luciferin; decomposition of dioxacyclobutanes, etc. Various techniques can be employed whereby the amount of light flux resulting from the fluorester or chemiluminescer can be modulated in relation to the amount of a material present in the incremental portion of a medium.

Besides variations in light, other phenomena, either chemical or physical, which can affect the photoresponse of the photoresponsive element can also be used to measure the state of the incremental portion. These phenomena include pH, ionic strength, redox potential, or the like. For the most part, these phenomena will require that the incremental portion be at or adjacent to the irradiation site on the photoresponsive surface.

The light source can be any convenient source, particularly of an energy at least about the conduction band gap or the photoresponsive element, so as to produce electron-hole pairs, i.e., free electrons and positive holes. The light source will generally vary in the range of visible to infra-red; for silicon, this is about 1.1 eV. This would provide for a wavelength range generally in the range of about 0.1 .mu. to 1 .mu., more usually from about 0.3 .mu. to 1 .mu.. Other semiconductors can be matched with a light source accordingly. By employing dyes as a thick layer on the photoresponsive surface, lower energy light may be employed coupled with a redox reaction. The light and dark periods for pulsed radiation may be the same or different, generally ranging from 10.sup.12 to 10.sup.-6 seconds. The total time of irradiation of a particular site is not critical and may range from 10.sup.-3 to 1 second.

Any source of light may be used which provides the means for providing intermittent light for short periods of time, particularly a source which can provide for cycling the light at a predetermined frequency, e.g., 100 Hz-100 kHz, usually 100 Hz-50 kHz, more usually 1-20 kHz, during the period of irradiation. Of particular interest are LED arrays, which are available providing various selected wavelength ranges of visible and infrared light. Alternatively, a single source can be used, e.g., fluorescent light in the visible region; or white light, for example, from a tungsten lamp; where shutters are used, nematic liquid crystals, gratings, optical fibers, choppers, or the like, may also find application.

Usually, the different sites will be irradiated at different times to provide a simple method for distinguishing between the signals associated with the individual sites. However, simultaneous irradiation of different sites may be employed, where a means is used to allow for distinguishing the signals, such as a phase shift, alternating frequencies, or other combinations where the signals can be segregated.

As indicated above, the subject application can address one or more incremental portions of one or more media to be analyzed, where the incremental portion or volume can be indicative of the gross properties of the medium or particular incremental portions of the medium, where properties of incremental portions may differ in their properties one from the other as well as from the properties of the gross medium. One can inspect incremental portions by irradiating a site on the irradiation-receiving surface which serves to interrogate a sample site on the sample surface associated with the particular incremental portion. Irradiation at a particular site may be achieved by employing a light source which irradiates the specific site, due to movement of the light source and the photoresponsive surface in relation to one another or by having a plurality of light sources, which irradiate different sites on the irradiation-receiving surface in accordance with a predetermined schedule, or combinations thereof. In this way, one can address different portions of the medium to determine the state of the incremental portion as to a variety of properties and determine variations in the state of the medium over a large volume. Furthermore, one can employ one or more channels and determine the state of the incremental portions along a channel, so that one can relate variations in the states of the incremental portions along the channel to a temporal change occurring in the medium. By using continuous or intermittent flow techniques, by mixing two media which provide for a detectable reaction prior to entering the irradiation path, one can provide a steady state at each irradiation site along the channel. In this manner, one can determine rates of reaction by observing the steady state properties of the medium at different sites along a channel.

Thus, the subject invention allows for the substantially simultaneous monitoring of temporal events. Therefore, one can choose to move either one or more light sources or the irradiation-receiving surface or have a plurality of light sources which will irradiate this surface in accordance with a predetermined schedule, or, with a plurality of isolated photoresponsive elements have simultaneous irradiation or irradiation at differing times.

Because of the diversity of properties which can be detected, the permissible variations in the conformations which can be employed and the flexibility in circuitry, a wide variety of different systems and situations can be addressed by the subject invention. While for the most part, fluids providing for modulation of a photoresponsive electrical signal will be monitored, the subject invention allows for monitoring of solid and semi-solids in appropriate situations.

The subject invention can be used for monitoring various streams such as effluents, natural bodies of water, industrial streams from chemical processing plants, refineries, power generation, and the like, air, or other fluid, where the fluid has a component which will affect a photoresponsive electrical signal or such component can be employed in conjunction with other materials to provide for such a response.

Illustrative of the use of the device is to have one or a plurality of channels between the sample surface and a transparent metal plate, where the photoresponsive material under the insulated sample surface and transparent metal plate serve as the plates of a capacitor. The effluent from a Cottrell precipitator could be directed from a number of different sources or the same source through a plurality of channels, where each of the channels could be monitored independently and substantially simultaneously. Where the charge might dissipate with time, by controlling the rate of flow through the channel, one could also determine the rate of dissipation of the charge by monitoring the signal at different sites along the channel. Thus, the change in the photoresponsive electrical signal in the downstream direction of the channel could be used to determine the rate of charge dissipation.

In another embodiment, one could monitor the change in biological oxygen demand or chemical oxygen demand of an effluent stream or river by having a plurality of channels which can divide up the stream into numerous individual channels, where different chemicals could be introduced into each individual channel, where the chemical or the product of the reaction provides for modulation of the photoresponsive electrical signal. Where there is a change in light absorption, pH, or other physical phenomenon, the rate of change can be determined by determining the change in electrical signal at different sites along the channel and relating the rate to the chemical or biological oxygen demand.

One can use the subject device for measuring rates of reactions such as enzymatic reactions, where the enzymatic reaction results in a change in absorbency of the medium, a change in pH, or the like. This can be done in a dynamic or static way in that by employing a moving stream, one can make the rate determination substantially instantaneously. Alternatively, by having a relatively static solution at a particular site which is irradiated intermittently, and readings taken at different times, one can also determine the rate.

The subject invention can also be used with semi-solid or solid media, employing appropriate adaptations. For example, gels can be used for detecting biological transformants, compatible viruses or other situations where one wishes to determine plaques. The method normally involves the growth of a cellular lawn on a nutrient agar and infection with a compatible or unknown virus. Where lysis occurs, a small plaque or clear spot forms. By placing the sample surface of the photoresponsive element adjacent the gel which will be buffered at a predetermined pH and ionic strength, one can detect the sites where the plaques exist and record those sites by scanning the gel from the opposite side of the photoresponsive element and detecting variations in light transmission.

Alternatively, frequently cells are transformed with a marker which provides for the expression of an enzyme which reacts with a substrate to produce a color. For example, .beta.-galactosidase is commonly used, since a commercially available substrate provides for a blue color. As described above, one could grow clones on the surface of a nutrient agar and then automatically screen the clones for the presence of a blue color.

A third situation involving gels may be exemplified by gel electrophoresis of proteins. After performing the electrophoresis, one could contact the gel with a solution of antibody for a protein of interest conjugated to an enzyme which produces a detectable product, for example, an acidic product. After incubating for a sufficient time for any antibody to bind to any protein which is available and diffuses into the gel surface, one could then add a thin layer of substrate and contact the photoresponsive surface with the aqueous layer. Once again, scanning the photoresponsive element with light would provide for detection of a variation in pH in the medium as a result of the presence of the particular enzyme.

A fourth situation similarly involves electrophoresis of proteins within gels containing a pH gradient. In these techniques, including isoelectric focusing, a pH gradient is set up by artificial means and the rate of migration or the endpoint position of protein migration within the pH gradient is analyzed. By means of scanning the gel surface with light, similar to the third situation above, both the pH of the gel at various points and the position of the proteins within the gel can be determined.

Instead of proteins, single- or double-stranded polynucleotide sequences may be electrophoresed. Where one uses a restriction endonuclease in digesting a DNA element, e.g., chromosome, virus or plasmid, where the length of the sequence(s) is related to a genetic trait by a particular polymorphism, a plasmid or a vital strain, the subject invention can be used to rapidly determine which polymorphism, plasmid or strain is present. After digestion and denaturing of the DNA sample, ssDNA markers of known length can be used in an adjacent band and the two mixtures electrophoresed. The separated DNA in the gel may then be transferred to a nitrocellulose film and fixed by heating. The fixed DNA may then be probed with a labeled probe under hybridizing conditions. The film is then scanned for the relative relationship of the hybridized dsDNA strands from the sample with the dsDNA strands from the marker by contacting the film with the sample surface of the photoresponsive element employing an appropriate medium for development of a detectable signal. Light is then directed through the film at different times along the length of the film and the relative separation of the dsDNA segments determined by the signal observed with the device. The spatial relationship of the segments can be used as diagnostic of the presence or absence of a particular DNA element.

Of particular interest will be the use of the subject invention in detecting the presence of a specific component of a medium, where the component may be a chemical, either synthetic or naturally occurring, such as drugs, hormones, proteins, steroids, receptors, nucleic acids, or the like; or aggregations of chemicals, such a nucleosomes, viruses, cells, both prokaryotic and eukaryotic, or the like. These determinations will frequently be made in physiological fluids such as blood, plasma, saliva, cerebrospinal fluid, lymph, urine, or the like.

The determinations will involve a combination of a ligand and receptor, where the ligand and receptor have a specific affinity, one for the other, so that they provide a pair of specific binding members. Receptors for the most part will be antibodies, enzymes, or naturally occurring receptors, and can for the purposes of this invention include nucleic acids, while ligands may be any compound for which a receptor is available or can be made.

The systems involving specific binding pairs may be varied widely and may involve a "homogeneous" system, where there is no binding to a solid surface or a "heterogeneous" system, where there may be binding, which binding is renewable or non-renewable. By "renewable" is intended that one can remove an active component of the assay system from the surface and replace it with a different component.

For the most part, an aqueous buffered medium will be employed, which may be lightly or heavily buffered depending on the nature of the material generating the signal. Various buffers may be employed such as carbonate, phosphate, borate, tris, acetate, barbital, Hepes, or the like, at concentrations in the range of about 0.01 to 0.5M. Organic polar solvents, e.g., oxygenated neutral solvents, may be present in amounts ranging from about 0 to 40 volume percent such as methanol, ethanol, .alpha.-propanol, acetone, diethylether, etc.

In the specific binding pair assays, there will be a label conjugated to a substance, where the modulation of the photoresponsive signal will be related to the amount of analyte in the sample being assayed. The substance may be the analyte, analyte analog, the complementary binding member, or a substance binding to any of these substances. Such substances include antibodies to the immunoglobulin of a species, e.g., sheep antibody to murine immunoglobulin. Also included are pairs, particularly hapten-receptor pairs, where the substance is modified with a hapten, e.g., biotin, and a reciprocal binding member labeled, e.g., avidin. Thus, the label may be bound directly or indirectly, covalently or noncovalently, to a member of the specific binding pair which includes the analyte.

A system is employed which may have one or more components which provides a material in relation to a sample site on the photoresponsive element which modulates the photoresponsive electrical signal. The manner of modulation may require material to be adjacent to the photoresponsive surface site, to be in the path of the irradiation light, or other requirement. A substantial diversity of modulating materials may be employed in the specific binding assays, which materials may be the result of a catalyzed reaction, e.g., an enzyme catalyzed reaction.

For the homogeneous system, it will only be necessary that binding result in modulation of an assay system which results in modulation of the photoresponsire electrical signal. The binding can occur adjacent to a sample site on the photoresponsive element or distant from the photoresponsive element, where the photoresponsive element can be used later to determine the level of the detectable compound in the assay medium. For example, one could carry out a plurality of assays in separate containers, e.g., microtiter plate wells, where a color, e.g., from dyes, is formed in each of the wells in accordance with the amount of an analyte. One could then place contents of the individual wells of the microtiter plate on individual respective sample sites of the photoresponsive element and by irradiating the different wells at a predetermined schedule, one could rapidly determine the signal for each of the sample sites. Where light absorbency is involved, it will frequently be desirable to have a relatively long path length. Thus, rather than employing the normal microtiter plate wells, one could employ walls enclosing the sample sites which were relatively deep and have a small diameter, so that the light would pass through a relatively long path length which would include most of the assay medium.

Where products other than dyes are produced which provide for the electrical photoresponse, it will be necessary that there be some electrical interaction with the photoresponsive surface. The electrical interaction requires contact with the insulated surface of the photoresponsive element. The electrical interaction can be the result of a change in pH, ionic strength, the redox level of the system, or the like. This can be achieved by having a plurality of wells in which various samples are assayed and then mechanically transferring an aliquot from each of the wells to a designated sample site on the photoresponsive element, where the sites are segregated from one another by various means such as partitions, porous solids, gels, or the like, where each sample may have an electrical interaction with a common photoresponsive semiconductor electrode or, alternatively, a separate controlling electrode may be issued for each sample site.

For the homogeneous assay, the assay can be carried out adjacent to the sample surface of the photoresponsive element by having a number of partial partitions extending only a portion of the distance through the assay medium, and introducing the sample adjacent to the sample surface. Since the rate of formation of the detectable product will vary with the amount of analyte in the compartment, by comparison of differences between compartments having known amounts of analyte and compartments containing the sample, one can relate the result to the standards. Homogeneous assays include such assays as described in U.S. Pat. Nos. (label) 3,817,837 (enzyme); 3,935,074. (any ligand); 3,996,345 (fluorescer-quencher pairs); 4,160,645 (non-enzymatic catalyist; 4,193,983 (liposome); 4,208,479 (enzyme modifier); 4,275,149 (particles); and 4,341,865 (suicide inhibitors), which appropriate parts are incorporated herein by reference. These patents involve enzymes, fluorescers, redox reagents, and combination thereof.

For example, there is a commercial assay sold under the trademark EMIT. The assay employs the enzyme glucose-6-phosphate dehydrogenase which produces NADH from NAD. By providing for reversible oxidation-reduction coupling at the sample surface of the photoresponsive element, the rate of formation of NADH by the enzyme may be determined by monitoring the rate of change in redox potential. In this case, the sample surface will, in addition, have a noble metal such as platinum or gold on the insulation and in contact with the sample. See U.S. patent application Ser. No. 072,168 for various additional embodiments.

The homogeneous enzyme assay employs antibodies to an analyte, where the analyte or an analyte analog is also bound to the enzyme to provide an enzyme-analyte conjugate. When antibody to the analyte binds to the enzyme-analyte conjugate, the enzymatic activity is substantially reduced. Thus, the rate of formation of NADH can be determined and related to the amount of analyte present in the volume adjacent the photoresponsive site.

In carrying out the assay, one could have the photoresponsive site with a plurality of partitions defining a plurality of compartments, where the assay medium extends beyond the partitions. The assay medium would include the enzyme conjugate and buffers, stabilizers, or other additives which are not directly involved in the system providing for the detectable signal. One would prepare a sample solution containing the antibody, the sample and appropriate substrates, the mixture incubated, and then injected into the appropriate compartment. The rate of production of a redox reagent, change in pH, or other detectable product could then be followed as indicative of the amount of analyte present in the sample.

Besides having an enzyme conjugated to the analyte or reciprocal binding pair member, one can also conjugate substrates, co-factors, suicide inhibitors, or the like. Various of these techniques are disclosed in U.S. Patents described above. Therefore, one could prepare a conjugate comprising a suicide inhibitor and an analyte. One could bind enzyme, either covalently or non-coalently, to a surface, either the sample surface of the photoresponsive element or to surfaces adjacent or in close proximity to the photoresponsive surface. A sample solution would be prepared of antibody to the analyte, the sample, the suicide inhibitor conjugate, substrates, and any additional reagents necessary for producing a detectable product. One could then add the sample solution to the enzyme bound to the surface and determine the enzyme activity. Another homogeneous assay employs an enzyme subunit of a multiunit enzyme, where the subunit can serve as the label. The binding of antibody to the subunit conjugate inhibits the complexing of the subunit to the other units. Alternatively, self-combining protein fragments can be employed. Exemplary of this is the enzyme ribonuclease which is cleaved by subtilisin into the S-peptide and the S-protein which recombine to form an active enzyme.

The heterogeneous system allows for separation between complexes between specific binding pairs and uncomplexed specific binding pair members. This is achieved by having one of the members of the specific binding pair bound to a solid surface. One could prepare a clear slide having specific antibodies at different sites on the slide so that one could assay a sample for a plurality of analytes. One would then add antibodies for each of the arialyres to the solution so as to employ a sandwich immunoassay. Conveniently, the antibodies would be monoclonal antibodies to minimize cross-reactivity. One would then add an enzyme conjugate to an antibody which is specific for immunoglobins from a particular species. For example, if the monoclonal antibodies are murine, one could prepare rabbit antibodies to murine immunoglobulin. Thus, only where the monoclonal murine antibody had bound would there also be enzyme conjugate. One would then place the clear slide adjacent the sample surface of the photoresponsive element in registry so as to define where each of the original antibodies were. A thin, liquid film at the surface would provide the appropriate reagents and substrates for reaction with the enzyme to provide the detectable compound. One would then irradiate the surface sequentially either through the clear slide or on the opposite side of the photoresponsive element to determine whether any enzyme had become bound at a particular site. In this manner, a sample could be assayed for a large number of different analytes substantially simultaneously to provide for a complete battery of determinations on a single sample, where extremely small amounts of the sample would be required.

Heterogeneous techniques are described in U.S. Pat. Nos. 3,654,090 (enzyme); 3,791,932 (enzyme); 3,853,987 (fluorescent particle); 3,970,518 (magnetic particle); and 4,134,792 (enzyme substrate), which patents are in appropriate part incorporated herein by reference,

If one wished to repeatedly use the same -surface, one could apply a member of a specific binding pair to the surface, where the complementary member is conjugated to a member of a specific binding pair related to the analyte. For example, one could coat the surface with the same or different sugars, haptens, receptors, antibodies or members of naturally-occurring, ligand-receptor pairs. One would then conjugate the member of the specific binding pair related to the analyte to the binding member complementary to the material bound to the surface. To illustrate, one could coat the surface with a saccharide and conjugate the andlyre-related specific binding pair member, e.g., antigem, to a lectin. Thus, one could prepare conjugates of antibodies to a protein analyte and lectins. By adding a solution of the antibody-lectin conjugate to the saccharide-coated surface, the antibodies would become bound to the surface. One could then carry out the assay as described above and after completing the assay, remove the complexed material from the surface by adding a concentrated solution of the saccharide. One can use other pairs by analogy, where in place of a lectin, an antibody or natural receptor could be employed. Thus, a single surface can be used which could be repetitively replenished, so that the same or different types of assays may be employed after each determination. By binding different compounds to the surface at different sites, one can direct specific binding pair members to a specific site with the appropriate conjugate.

Various techniques may be used with enzymes for amplification and enhanced sensitivity. pH cascades can be employed by employing enzymes having different pH optima. By having the bulk solution at a pH for one enzyme, which produces a product which can provide a different pH in a localized environment, which is the optimum for a second enzyme, which produces a product which further changes the pH in the same direction, one can provide for localized enhancement or amplification. Similarly, one may employ enzymes which require co-enzymes or substrates which can be produced by another enzyme. In the example given above, one could bind a first enzyme to the slide and have the second enzyme conjugated to the receptor. Thus, the first enzyme could provide for a high localized concentration of the substrate or co-enzyme for the second enzyme. Illustrative enzyme pairs include glucose oxidase and horseradish peroxidase to produce a densely colored product, a kinase and G6PDH, which with glucose and NAD can produce NADH, which may then be coupled with INT dye, etc.

Catalysts other than enzyme catalysts may be used, particularly redox catalysts. These catalysts may include such compounds as phenazine methosulfate, methylene blue, nicotinamide adenine dinucleotide, Meldola blue, flavin mononucleotide, ferri- and ferrocyanide, and the like. These compounds may be used in conjunction with enzymes or other catalytic compounds to provide for a redox potential at the sample surface of the semiconductor or other photoresponsive element. For example, instead of conjugating receptors with enzymes, one could conjugate receptors with phenazine methosulfate, Meldola blue, methylene blue, etc. By then employing the couple of NADH and a tetrazolium salt, redox potential change could be produced at the surface.

Redox reagents can be coupled with naturally occurring enzyme transport systems involving cells, membrane fragments, or individual members joined in vitro or unassociated in the medium. Thus, amplification can be achieved. Alternatively, the presence of intact cells or cell fragments can be detected by their influence on a redox couple.

In many situations, it will be of interest to determine the presence of a natural receptor in a physiological fluid, particularly blood and plasma. Usually, the receptor will be an antibody resulting from an autoimmune disease, foreign substance, or an infection. The antibody may be detected in a competition assay, where the endogenous antibody competes with labeled antibody for the complementary antigen, or the antibody may serve as a bridge to bind labeled antigen to antigen bound to a surface or particle. Otherwise, for the most part, the antibody assay would follow the techniques employed for detecting antigens.

In some situations, it may be desirable to have lipid mono- or bilayers covalently or noncovalently bound to the sample surfaces of the photoresponsive element or other surface which can be brought in proximity. A single lipid layer may be formed by employing aliphatic silyl halides or esters, where the silyl compound may have from one to three aliphatic chains, generally of from about 12 to 24 carbon atoms, more usually of from about 12 to 20 carbon atoms. In addition, other materials may be present, either bonded to a silyl group or bonded to the aliphatic chain, including aryl groups, functionalities, e.g., carboxyl groups, halo groups, amino groups, or the like. One can then provide for the second layer by dipping the surface through a lipid monolayer, and then raising the surface horizontally so that the second layer forms on the first layer to form a bilayer.

A wide variety of lameliar-forming lipids may be employed, particularly phospholipids used in the formation of liposomes and the like. Alternatively, a bilayer may be formed by plasma cleaning of the particular surface, passing the wafer vertically through the monolayer, and pulling the wafer out at a speed slow enough to permit water to drain from the surface. The wafer is then pushed through the monolayer horizontally, followed by covering with a cover slip.

The bilayers allow for lateral diffusion within the layer. One can provide for various groups bound to lipids which will specifically bind to an analyte, e.g., antibodies. One could provide for the presence of fluorescers or quenchers bound to antibodies which are specific for different antigens on a cell surface. The presence of the cell will concentrate the quenchers or fluorescers which would inhibit or enhance, respectively, any fluorescence upon excitation of the bilayer. Where the light emitted by the fluorester exceeds the energy of the conduction band gap, and particularly, where the light used for excitation is parallel to the photoresponsive surface, the amount of light which strikes the surface will be related to the presence or absence of a cell having the antigenic sites associated with the antibodies bound to the bileyet. It is not essential that the light be parallel to the photoresponsive surface, it being sufficient that it either be normal to or at an angle, where there is either substantial diminution or enhancement in signal when the cell having the complementary antigenic sites is present and binds to the antibodies present in the bileyet.

The use of bilayers can also be coupled with ionophores as labels, where the ionophores allow for transport of ions through the bileyet to the sample surface of the photoresponsive element. Thus, ionophores may be coupled to specific binding partners, e.g., ligands or receptors which would specifically bind to their complementary partner bound to the bileyet. The presence of the free ionophore would modulate the photoresponse due to the enhanced concentration of ions in close proximity to the surface. Illustrative ionophores include mellitin, nonactin, valinomycin, alamethicin, crown ethers, and the like.

Besides haptens, proteins and saccharides, nucleic acids can also be detected by the subject method. Nucleic acids, either RNA or DNA, can be detected by hybridization with probes having complementary sequences in a competitive or non-competitive manner. In a competitive manner, a nucleic acid sequence may be bound to a surface. A sample suspected of containing the complementary sequence may be combined with a labeled complementary sequence, e.g., labeled with biotin. The mixture is then combined with the surface bound polynucleotide under hybridization conditions and non-specifically bound oligonucleotides removed. Enzyme-avidin conjugate may then be added, where the avidin binds to any biotin present. The presence of specifically bound enzyme may then be detected in accordance with the ways described previously.

Alternatively, a sample containing a plurality of microorganisms may be spread on an appropriate nutrient agar gel and cloned. Employing the Grunstein-Boghess technique, cells are transferred to a nitro-cellulose porous film in appropriate registry with their position on the gel, lysed and the DNA fixed to the film by heating. Probes having a complementary sequence to a unique sequence of the organism of interest are provided as partial single strands with a double-stranded 3'-terminus having a sequence specifically recognized by a protein, e.g., repressor, rho, N protein of lambda, or the like. The film is contacted with the probe under hybridizing conditions, e.g., 50% aqueous saline dimethyl formamide and the hybridization solution then removed. After washing the film, a solution of the specific binding receptor labeled with a plurality of catechols may be added. After sufficient time for the labeled protein to bind, the film is washed free of non-specifically bound protein and placed in close-facing Juxtaposition to the photoresponsive surface. A dilute boric acid solution is then added and the pH determined at individual sites associated with each clone by irradiating each clone. The acidity of the complexed boric acid distinguishes the presence of the microorganism of interest.

The microorganisms can also be used to measure the presence of a biostat or biocide in a medium. By combining the medium with growing microorganisms and determining the rate of growth of the microorganisms as compared to a standard differing only in the absence of the medium, the presence of a biocide can be detected. By employing immortalized mammalian cells, e.g., tumor cells, the presence of growth regulators can also be detected.

Finally, the rate of flow of a medium can be determined by determining the streaming potential, e.g., tribovoltaic effect.

The following examples are illustrative of the manner in which the subject methology could be used. The device, either a single surface or a plurality of individual non-contiguous surface units, has partitions to isolate individual areas or compartments. A film is employed proximate to the surface having lectins specific for a particular mono- or oligosaccharide. Antibodies are modified with the particular saccharide and antibodies for the same or different ligands are introduced into each compartment and the excess washed away. A sample is now introduced which overflows the compartment partitions, and any complementary ligand becomes bound in the appropriate compartment. The sample is then washed away and an antibody mixture added which binds to the single or multiple ligands bound to the antibodies in the compartments. These antibodies are all from a single source, e.g., mice. The antibody solution is washed, a conjugate of an enzyme with rabbit antibody to mouse immunoglobulin is added and allowed to overflow the compartment walls and bind to any mouse immunoglobulin in the compartments. The non-specifically bound enzyme may then be washed away, and the enzyme activity in each compartment determined by adding a substrate medium to each compartment which provides a product which can be photoresponsively determined, e.g., pH change, color absorbency, redox potential change, etc.

A different technique would involve a gel where different antibodies are present at about 2 mm intervals. The gel is made with a salt solution and is in contact for electrical communications with a salt solution. The gel is then contacted with the sample which contains conjugates of ligands of interest, where the label is a long-lived fluorescer, e.g., a europium chelate, The amount of the fluorescer present at each site on the gel will be inversely proportional to the amount of free ligand present. After removing any non-specifically bound fluorescer, the individual sites are irradiated and the signal observed after the irradiation has stopped and the fluorescent light is emitted.

In another embodiment, individual photoresponsive units are provided having antibodies covalently bonded to the surface of each unit through a silyl-substituted aliphatic carboxylic acid. The sample is then contacted with the bound antibody, the sample washed away and enzyme-conjugated-antibody added. After sufficient time for binding, non-bound enzyme is removed and a developer solution added which contains enzyme substrate. The amount of enzyme product produced by the enzyme can be monitored by the photoresponsive element by measuring the rate of change in light or absorbance, fluorescence, chemiluminescence, pH, redox potential, etc. caused by the enzyme.

One example of a process for fabricating a semiconductor structure suitable for use in accordance with the teachings of this invention is depicted in the cross-sectional views of FIGS. 8a through 8f. As shown in FIG. 8a, an N type silicon substrate 200, having resistivity within the range of approximately 10 to 20 ohm-centimeter, is used. Substrate 200 is subjected to thermal oxidation in order to form field oxide layers 201 and 202 on its top and bottom surfaces, respectively. A layer of photoresist (not shown) is then formed on the surface of field oxide 201 and patterned in order to define the field regions of the device. As shown in FIG. 8b, the exposed portion of field oxide 201, and the entire layer of field oxide 202, are then removed, for example using a buffered oxide etch. This step leaves field oxide 201 in the field areas of the device, and exposes active area 203 of silicon substrate 200. The layer of photoresist is then removed.

As shown in FIG. 8c, gate oxide 204 and backside oxide 205 are then formed to a thickness of approximately 300 .ANG., for example by thermal oxidation. Silicon nitride layers 206 and 207 are then formed on the top and bottom surfaces of the device, i.e. on field oxide layer 201 and gate oxide layer 204, and on backside oxide layer 205, respectively. Silicon nitride layers 206 and 207 are formed, for example, by low pressure chemical vapor deposition to a thickness of approximately 1000 .ANG.. The top surface of the device is then protected with a layer of photoresist (not shown), and the backside layer of silicon nitride 207 is then removed, for example by using a suitable plasma. The resulting structure is shown in FIG. 8d.

Referring now to FIG. 8e, the photoresist (not shown) formed on the top surface of the device is left intact. The exposed backside oxide 208 is then removed, for example using a suitable buffered oxide etch. The photoresist is then removed.

Still referring to FIG. 8e, a new layer of backside oxide 210 is formed, for example by thermal oxidation, to a thickness of approximately 700 .ANG.. Subsequently, a layer of photoresist (not shown) is formed on the backside of the device in order to protect that portion of backside oxide 210 beneath the active area of the device. Using a buffered oxide etch, for example, the exposed portions of the backside oxide layer are then removed and the photoresist removed, leaving the backside oxide patterned as shown in FIG. 8e. By forming oxide 210 beneath the active area, distortions in the photoresponse of the device are minimized, especially when substrate 200 is formed of P type material. Still referring to FIG. 8e, dopants are introduced into regions 209 of substrate 200 in order to provide a good ohmic contact between substrate 200 and to-be-formed metallization contact areas. When substrate 200 is N type material having a resistivity of approximately 10 to 20 ohm-centimeters, regions 209 may be formed by implanting phosphorous at approximately 80 KeV to a dose of approximately 2.times.10.sup.15 atoms/cm.sup.2.

Subsequent to the introduction of dopants into regions 209, the device is subjected to a hydrogen anneal by placing the wafer in a nitrogen atmosphere at approximately 650.degree. C. for 3 minutes, followed by a hydrogen atmosphere at approximately 650.degree. C. for approximately 3 minutes, and then ramping the wafer up to approximately 1050.degree. C. over approximately 60 minutes in a hydrogen atmosphere, maintaining the wafer in a hydrogen atmoshpere for approximately 60 minutes at approximately 1050.degree. C., ramping the wafer down in a hydrogen atmosphere over a period of approximately 133 minutes to a temperature of approximately 650.degree. C., and holding the wafer at a temperature of approximately 650.degree. C. for approximately 3 minutes in a nitrogen atmosphere. This hydrogen anneal step serves to remove unwanted surface states, thereby providing a photoresponse which is free of hysteresis and consistent over time.

Then, as shown in FIG. 8f, conductive material 211 is formed in order make ohmic contact to regions 209, and thus form electrical connections to substrate 200. Conductive material 211 can be formed, for example, by depositing a layer of gold, aluminum, an alloy of aluminum and silicon, or an alloy of aluminum, silicon, and copper, to a thickness of approximately 1.1 microns, on the entire backside of the device. This layer of metallization is then patterned by first applying a layer of photoresist (not shown), which itself is then patterned in order to expose those portions of the metallization layer lying on backside oxide 210. Then, utilizing a suitable etchant, the exposed portion of the metallization layer is removed, thereby leaving electrical contacts 211 as shown in FIG. 8f. The photoresist is then removed, and the remaining portions of metallization are then alloyed in a well known manner. If desired, the hydrogen anneal step can be performed with a layer of oxide intact on the backside of the device, with both a layer of oxide and a layer of nitride intact on the backside of the device, or with no oxide or nitride remaining on the backside of the device.

If desired, silicon nitride layer 206 can be treated to increase the pH response characteristics of the device. Any suitable treatment of silicon nitride may be utilized, including slight etching with hydrofluoric acid or hot phosphoric acid or, preferably, etching with potassium hydroxide (KOH). In one embodiment, silicon nitride layer 206 was etched in 1M KOH for between 3 and 18 hours. In another embodiment, such treatment using LiOH, NaOH, KOH, RbOH, CsOB, or FrOH was performed following treatment of silicon nitride layer 206 in either hydrofluoric or phosphoric acid. For example, in one embodiment, silicon nitride layer was etched in phosphoric acid at approximately 133.degree. C. for approximately 10 to 20 minutes, followed by etching in 1M KOH for 3 hours or more.

Various circuits may be employed for determining the state of the medium adjacent the surface. Besides the photoresponsive sensing electrode, there will be at least one counterelectrode, preferably two counterelectrodes, and there may be a counterelectrode for each compartment or channel of the device. The same or different electrode may serve as a controlling or reference electrode.

One embodiment of a circuit suitable for use in accordance with the teachings of this invention is described with reference to FIG. 9. As shown in FIG. 9, a source of variable potential 916 and amplifier means 915 are used to apply an appropriate bias potential to control electrode 916. In the embodiment of FIG. 9, reference electrode 911 is connected to the inverting input lead of amplifier 915, thereby providing a feedback signal for maintaining a desired potential on control electrode 912. In one embodiment of this invention, variable potential source 916 and amplifier 915 are provided by a potentiostat which is commercially available. LED driver 917 operates to provide current to light-emitting diode 914. In one embodiment, driver 917 provides a square wave having a frequency f.sub.m of approximately 10 KHz. The light from light-emitting diode 914 is applied to semiconductor wafer 922 including electrically insulation layer 953, in order to cause a alternating photocurrent to be made available on electrode 913. This photocurrent is applied to current-to-voltage amplifier 918 (in one embodiment an operational amplifier), whose output voltage is applied to bandpass filter 919 (for example an RC network), tuned to have a center frequency equal to f.sub.m. The output from bandpass filter 919 is rectified by diode 920, and-the resulting voltage is measured by measurement device 921, for example an analog-to-digital converter (ADC).

In operation, current is applied from LED driver 917 to cause LED 914 to be illuminated. The bias potential applied to control electrode 912 is swept over a range of potentials, thereby causing the resulting photocurrent available at electrical contact 913 to increase from substantially zero to a maximum value. FIG. 10 shows a graph depicting the alternating photocurrent resulting from such changes in the bias potential. These readings are stored and analyzed in order to determine the state of the sample being analyzed.

In one embodiment of this invention, reference data is maintained so that the readings from the sample being analyzed may be compared with the reference data in order to determine the state of the sample being analyzed. In another embodiment, repetitive readings are taken, in order to determine the relative rate of change of the sample being analyzed. One way of analyzing the data is to determine the point of maximum slope in the curve of FIG. 10, i.e. that point at which the resulting photocurrent finds its maximum change for a given change in bias potential. A convenient way of determining this point of maximum slope of the current of FIG. 10 is to take the second derivative and determine where the slope of the second derivative is equal to zero. This is depicted in the graph of FIG. 11. Naturally, other suitable analysis techniques may be used. In one embodiment of this invention, the data of FIG. 10 near the maximum and minimum photocurrents are not used in the analysis. For example, the data points associated with photocurrent less than 10% and more than 90% of the maximum photocurrents are not utilized, since a relatively small amount of noise will cause serious errors in these data points. Another way of accomplishing this effect is to consider only data points between the largest maximum and smallest minimum of the second derivative curve of FIG. 11.

Various counter-electrodes of a variety of materials may be used, so long as the materials of the counter-electrode do not adversely affect the photoresponsive electrode, are not adversely affected by, and preferably not sensitive to the electrically communicating medium, and do not adversely affect the electrically communicating medium. Illustrative electrodes include such materials as platinum, rhodium, palladium, silver-silver chloride, calomel, conducting glass electrode (SnO.sub.2, InO.sub.2 or ITO), etc. In some instances, it may be desirable to encase the electrode in an electrically communicating shield, e.g., gelatin.

In one embodiment, there are three electrodes, the sensing photoresponsive electrode, a reference electrode and a controlling electrode. The potential between the sensing electrode and the reference electrode can be varied by varying the potential applied to the controlling electrode with respect to the sensing electrode. The light emitting diode or other light source is powered with an external electronic circuit so as to emit light which varies in a regular pattern, e.g., square-wave, sine-wave, etc., in intensity with time, resulting in a time dependent response of the sensing electrode, which can be detected by measuring the current through the controlling electrode required to maintain a constant potential between the sensing electrode and the reference electrode.

In this configuration, the peak to peak amplitude of the periodically varying current through the controlling electrode varies as a function of the chemical environment at the sensing electrode and as a function of the potential applied between the sensing electrode and the controlling electrode. This configuration can be further simplified by shorting together the leads to the controlling and reference electrodes and removing the reference electrode from the circuit.

Turning now to FIG. 1, the semiconductor electrode 10 is positioned at the surface of an aqueous medium 12. Lead 13 and the potentiostat 11, e.g., Model 363 Potentiostat/Galvenstat PAR (Princeton Applied Research), connect the semiconductor electrode 10, the reference electrode 14 and the controlling electrode 15. The potentiostat 11 supplies a polarizing current through the controlling electrode 15 and sensing electrode 10, so as to capacitively charge the insulating Iayer 17, which maintains a constant potential between the sensing electrode and the reference electrode 14. Transient changes in this potential result in transient current output from potentiostate 11.. The transient or alternating current amplitude required to maintain a fixed potential between electrodes 10 and 14 is recorded as a voltage on meter output 16. An LED 32 is controlled by pulse circuit 34 to emit regular pulses of light at a predetermined frequency. In operation for example, light from LED 32 travels through medium 12 and is absorbed within electrode 10. The transient light absorbtion results in an alternating photopotential generated within the photoresponsive sensing electrode 10 which in turn results in an alternating photocurrent supplied by potentiostat 11. This alternating photocurrent will vary as a function of the potential applied between electode 10 and electrode 14 and as a function of the chemical environment near the irradiated site on sensing electrode 10. Examination of this alternating photocurrent as a function of the potential applied across electrodes 10 and 14 will reveal changes in chemical environment. Thus, the change in this current, which is measured by meter 16, is a function of the change in the chemical environment near the site being tested. Alternate sites can be tested by a number of methods described earlier, such as by shining the light on different sites at different times. The chemical environment at a number of isolated sites on the single electrode 10 can thus be tested utilizing the circuit of FIG. 1.

The sites can be isolated, for instance, by using a silicon wafer for electrode 10 to measure pH changes. The image charge formed by a pH change at a site on the wafer will produce a localized electric field within the silicon; however, the electric field will be shielded by charges within the silicon and thus will not extend appreciably to a separate site, thus providing for isolation of sites.

Another circuit involves automatically varying the potential between the controlling and sensing electrodes so as to maintain a constant amplitude sinusoidal current through the controlling electrode in response to sinusoidal irradiation of the sensing electrode. Thus, variations in the chemical environment near the sensing electrode can be determined by measuring the potential required to maintain a constant current. In addition, this method allows the sensing electrode to be operated at an optimum signal current which provides for optimal detection of small variations in potential (over noise) as a function of the chemical environment. Thus, small changes in the chemical environment will be detected over noise in the environment.

Turning now to FIG. 2, the circuit has depicted a silicon wafer 42 which serves as the sensing electrode and a platinum electrode 43 which serves as the controlling electrode. (Resistors and capacitors will not be specifically mentioned, although depicted in the figure.) An operational amplifier 44 converts the current passing through the controlling and P doped silicon semiconductor electrodes to a voltage and feeds the signal to a bandpass amplifier 46, which is comprised of three operational amplifiers 50, 52 and 54. Bandpass amplifier 46 filters out unwanted noise and passes the sinusoidal frequency being used for the measurement. The signal from the bandpass amplifier 46 is fed to the precision rectifier 56 which includes two operational amplifiers 60 and 62 as well as two diodes 64 and 66. A variable RC filter 70 is provided to smooth out the rectified signal, and determine the response time of the circuit to changes in the chemical environment at the silicon electrode. A negative signal is fed from RC filter 70 to the controlling amplifier 72 which includes potentiometer 74 and operational amplifier 76. The output of controlling amplifier 72 serves to control the potential at the platinum electrode 43. The negative signal fed to the controlling amplifier 72 is related to the amplitude of the alternating current through the Pt and Si electrodes in response to the sinusoidal irradiation of the Si electrode 42. For recording, the output signal from the controlling amplifier 72 is fed to a unity gain amplifier 77 which allows for control of the base value for the recorder. Output 78 of amplifier 77 shows the amount of feedback provided to platinum electrode 43 and is a function of the chemical environment near sensing electrode 42.

Thus, as different sites are irradiated with regular sine-wave pulses on the silicon wafer surface, the recorder will respond with the reading of the potential between the Pt and Si electrodes necessary to maintain a constant amplitude alternating current through the Pt and Si electrodes. This circuit is referred to as CAM for constant amplitude module. Circuitry not shown provides for sinusoidal light irradiation of the wafer in accordance with a predetermined schedule.

A third general circuit which may be employed involves automatically varying the peak-to-peak amplitude of the LED output so as to maintain a constant photoresponse of the sensing electrode at a constant potential between the sensing and controlling electrodes. In this configuration, the detected signal which is sensitive to the environment at the sensing electrode is the peak-to-peak current passing through the LED.

Where capacitance is employed as the electrical response, the change in capacitance can be determined by modulating the potential applied across the photoresponsive electrode and measuring the resultant alternating current. The difference in the capacitive current with a dark or illuminated photoresponsive electrode also will be affected by the potential applied across the photoresponsive electrode as well as the chemical environment at the sensing electrode. Thus, this photocapacitance may be analyzed similarly to the method given above for the analysis of photocurrent in order to gain information as to the state of the medium.

FIG. 3 shows a cross-section of an exemplary device having silicon wafer 80 (corresponding to sensing electrode 10 of FIG. 1) connected to a circuit (such as that of FIG. 2) by wire 82 and mounted in container 84. Container 84 has a plurality of compartments 86 in which different assay samples are present. The compartment walls 88 would generally be of about 0.5 to 5 mm in thickness. As a reaction proceeds in each of the compartments, particularly where the reaction occurs adjacent the wafer surface, a product is produced which diffuses to the insulated wafer surface 90. For example, in the case of a pH-changing reaction, the protons or hydroxide ions produced in the compartment migrate to the surface 90 and create a surface potential by binding to, or consuming protons bound to proton binding sites on the insulator surface. Relatively ideal insulators for this purpose are silicon-nitride or oxides of aluminum, titanium, tantalum, or the like. In this manner, there is relatively little interference between the signals obtained from the various sites on the insulated wafer surface 90 associated with an individual compartment 86. A transparent or semi-transparent window 93 is separated from the insulated silicon surface 90 by means of the supports 94. A small gap 95 is present between the insulated surface 90 and the walls 88, so that the fluid can communicate between the compartments and provide for electrical communication between the insulated silicon-electrode 80 and platinum electrodes 97. The compartments 99 will be unaffected by changes in compartments 86 so as to maintain the solution composition substantially constant during the assay. An array of LEDs 92 provide for sequential illumination through compartments 86 to an associated site on the transparent insulated surface 90. The signal is read in association with the period of illumination. Thus, the single wafer 80 is used to measure the chemical environment at a plurality of sites. The reading and recording of the various signals at different times can be done manually or by using a microprocessor or similar means.

Shown in FIG. 12 is one embodiment of a sensor configuration suitable for potentiometric detection of substances present in nonconductive media such as nonconductive gases. Insulating layer 1 conveniently is comprised of 1000 angstromns of silicon nitride over 300 angstroms of silicon oxide. The silicon oxide is in contact with silicon substrate 2 which is approximately 0.5 mm thick. An ohmic contact 3, connected to lead 4, is made to the silicon substrate. Lead 4 in turn is connected to variable potential source 5 which is connected to ammeter 6 capable of detecting alternating current. Ammeter 6 in turn is connected through lead 7 to conductive sensing substances 8, 9, 10, and 11 which are adjacent to insulator 1. Sensing substances 8 through 11 may be the same for detection of a single type of analyte in a volume associated with each site. In this case, a system of tubes or channels (not shown) is used to direct the different samples to the sensing substances. Alternatively, the sensing substances may be different so as to detect various different analytes in one or more volumes. Light-emitting diodes 12, 13, 14, and 15 irradiate, intermittently, silicon substrate 2 so as to produce, intermittently, silicon substrate 2 so as to produce, intermittently, electron-hole pairs in the silicon at sites adjacent to insulator 1 which are, in turn, adjacent to substances 8, 9, 10, and 11, respectively, so as to potentionmetrically measure the change in analyte composition in contact with substances 8, 9, 10, and 11, respectively. The principles of the measurement and the electronic circuits that may be used are similar to those mentioned previously for detection of analytes in liquids and solids. In this embodiment, however, the medium, containing the analyte need not be conductive and may, for example, be a nonconductive gas.

In FIG. 4 is a partially broken-away diagrammatic view looking downwardly on a device employing a plurality of channels. A housing 100 has a plurality of channels 102 having an inlet manifold 104 and an outlet manifold 106. A single reference electrode 108 is provided as well as a plurality of controlling counterelectrodes 110 deposited on the inner surface of the window 111. A plurality of inlet ports 112 associated with each of the channels is provided for introduction of the sample into a particular channel. The sample mixes with the away medium from manifold 104 and the mixture proceeds through a channel 102. The base of the channel is an insulated photoresponsive electrode 114. An air bubble may be introduced after the sample to separate the sample mixture from the following fluid. An LED array is provided, which is not shown, which illuminates each of the channels along its length so that one or more sites in each channel 102 can be irradiated. The insulator of the photoresponsive electrode 114 is in contact with the sample assay medium streams passing through channels 102 and filling the channels so as to be in contact with the counterelectrodes 108 and 110.

In this mode, one could employ a homogeneous assay technique employing an enzyme which catalyzes the reaction resulting in a change in pH or redox potential of the assay medium. The rate of the reaction in each channel can be determined by taking sequential readings as a function of time at the same or different points. The rate of reaction can be determined by making sequential readings as the assay medium traverses the channel at different points along the channel. Thus, the rate of change of enzymatic activity in each channel can be determined and related to the concentration of analyte in the sample assay medium. The continuous flow of assay medium through the channel can serve to wash the channel and restore the channel for the next determination. Alternatively, by employing various valves, one can alternate medium with wash solution so as to restore the channel to its original state.

FIG. 5 is a diagrammatic view of a photoresponsive surface having a plurality of sites which are insulated one from another, but connected to a common bus and having independent compartments for the assay medium. The device has a container 120 which is shown as having only 6he line of photoresponsive semiconductors 122. The photoresponsive semiconductors are in electrical contact with a common bus 124, connected to lead 126 for connection to an appropriate circuit (such as the circuit of FIG. 2). A plurality of tubes 130 connected to inlets 132 provide for introduction of solutions into the compartments 134. Each of the compartments is separated by dividers 136. The tubes 130 have three-way valves 140 so that the wash solutions or other common solutions may be introduced or removed by means of inlet port 142. By appropriate manipulation of the valves 134, the same solution may be introduced or removed from each of the compartments simultaneously, assuring uniformity. Individual sample inlets 144 are provided for each compartment, so that the sample solution is directly introduced into a compartment 134 without contamination from other samples. A common counterelectrode 146 is employed and introduced into a transparent conductive gel 148 to provide for conduction of the photocurrent between electrodes 146 and 122. These electrodes are connected to the circuit, now shown, to which the common bus is connected. An LED array 150 is provided having individual LEDs 152 which can be controlled to sequentially illuminate the compartments in accordance with a predetermined schedule, so that the observed signal can be related to a specific compartment. The sample surface of the photoresponsive elements 122 is entirely coated with an insulating layer. The insulator, in turn, is partially coated with a specific binding layer indicated by the dark line 154. For the purposes of the following example, the specific binding layer would be a saccharide layer for which a specific lectin was available.

An assay could be carried out as follows: Using a manifold 156, the valves 140 would be arranged so that a solution containing an enzyme such as acetylcholinesterase conjugated to lectin could be simultaneously introduced into each of the compartments through inlets 132. After a sufficient time for incubation, the solution would be withdrawn through inlets 132 and each of the compartments washed with an appropriately buffered wash solution. Individual sample solutions would be prepared containing an unknown sample or a standard, antibody to analyte, e.g., morphine, and a morphine conjugate to an acetylcholinesterase inhibitor, e.g., morphine fluorophosphonate, methyl, ethoxy, thiophisphates, etc. Also included would be an acetylcholinesterase substrate and the solution lightly buffered to pH 7. Each of the compartments would then be partially filled with the lightly buffered solution, whereupon introduction of the sample through sample inlets 144 and inlets 132 the compartments would overflow, so that there would be uniform electrical contact with-the transparent conductive gel 148 and thus also counter electrodes 146.

The hydrolysis of acetylcholine results in production of acetic acid which would change the pH of the medium adjacent to the sample surface of the photoresponsive element. The amount of enzyme which is inhibited would be directly proportional to the amount of analyte in the sample, since enzyme inhibitor conjugate bound to antibody to analyte would be inactive in inhibiting the enzyme. After sufficient time for reaction to occur to obtain a detectable signal at the concentration range of interest, the compartments would be sequentially irradiated and the signals detected by means of the circuit, not shown. After a sufficient time when one or more readings would have been made, the assay determination would be terminated by withdrawing the solutions from each of the compartments through inlets 132 and inlet port 142 by turning valves 140 to connect each of the inlets 132 with the inlet port 142. After removal of the assay media and washing the compartments, a concentrated saccharide solution would then be introduced into each of the compartments repetitively until all of the enzyme had been removed from the surface. The compartments would then be washed with a wash solution to remove all of the unbound saccharide, followed by introduction of the enzyme-lectin conjugate to restore the compartment to its original state for performing an assay.

The following experiments were constructed to demonstrate the use of the device to monitor three different characteristics of fluid media: The first characteristic being pH, the second being the presence of molecules capable of participating in redox reactions, and the third being the presence of light-absorbing species in the illumination pathway. Evidence is also presented showing that signals are modified specifically by chemical species adjacent to the illuminated sample site of the silicon wafer and that the presence or absence of similar species at adjacent but non-illuminated sample sites have negligible effect.

Except where indicated otherwise, the experiments described in the following paragraphs employed the CAM-controlled device together with a single photoresponsive semiconductor electrode having two fluid-filled, open-ended channels adjacent to its surface. The semiconductor electrode is a 2-inch diameter P111 7-14 ohm "Pen Prime" boron-doped silicon wafer soldered to a copper wire, with electrical contact effected by use of an indium-gallium mixture. To construct the channels, the wafer is fixed to an optically clear garnet wafer by means of three strips of tape having adhesive on both sides and a thickness of 70 .mu.. This dimension is then the depth of the channels, the other dimensions being 0.5 cm width and 3 cm length. The exposed garnet surface is then covered by optically opaque black electrical tape, except at two 25 mm.sup.2 sites. These two transparent sites are each adjacent to one of the two channels and also to one of two LEDs. This configuration allows for site-specific (and channel-specific) illumination of the opposing continuous silicon wafer surface. The semiconductor electrode is positioned in such a way that the two channels both dip a few millimeters into the same bath of 40-50 ml 0.1M phosphate buffer, pH 6.7-6.8. The platinum electrode is either placed in this same bath or in an adjacent bath containing 40-50 ml 0.1M phosphate buffer to which is optionally added, particularly for redox measurements, K.sub.4 [Fe(CN).sub.6 ] at 0.2 mM and K.sub.3 [Fe(CN).sub.6 ] at 0.3 mM (approximately). In this latter mode, the bath containing the platinum electrode is connected to that containing the silicon electrode by means of a salt bridge of half-saturated KCl solution, solidified by 2% agar. The ionic redox couple facilitates reversibility of the platinum electrode, a feature which may be important to reduce drift and increase electrical stability for some applications.

In the mode described above, the applied potential is typically -600 mV to -1000 mV with the AC photoresponse fixed at a preselected value. The silicon electrode in this case was coated naturally with a "native" oxide layer which forms spontaneously on silicon in air. For stability and optimal pH sensitivity, however, the preferred mode is that which is mentioned previously where a thermal exode is grown on silicon, a CVD nitride layer next deposited, and the entire structure annealed in a hydrogen ambient.

To demonstrate use of the device to sense pH, a series of six buffered salines was prepared with pH values (as determined using a Fisher Accumet pH meter, Model 620) of 4.0, 5.0, 6.0, 7.0, 8.0, 9.0. In all cases, the buffering species was at 0.01M and NaCl at 0.135M. For buffered salines having pH 4.0 and 5.0, the buffering agent was acetate; for buffered salines having pH 6.0 and 7.0, the buffering agent was phosphate; for buffered salines having pH 8.0 and 9.0, the buffering agent was TRIS. A channel adjacent to the silicon wafer was sequentially filled with each of the buffered salines and illuminated, as previously described, by an LED. The applied potential required to maintain a constant photoresponse was recorded. This applied potential is roughly proportional to pH, with a slope of -40 mV per pH unit. When the second channel was similarly illuminated and sequentially filled with buffered salines, an essentially identical result was obtained. Changing the pH of the fluid in the non-illuminated site had no effect on the reading from the illuminated channel where the latter is maintained at a constant pH, i.e., the response is specific for the channel which is being illuminated and so can be used-to monitor pH variation at different sites on the same wafer: selection being effected by varying the site of illumination.

When the device is maintained at constant applied potential with the monitored response being the amplitude of the alternating photoinduced current, analogous results are obtained on variation of pH at different sites on the wafer. For example, the fact that the photoresponsive electrode can sense pH gradients at its surface was further demonstrated using a fixed applied potential. An aqueous solution of (w/w) gelatin was made in 0.15M NaCl. The gelatin was deposited to a depth of about 5 mm in a 100 mm diameter plastic Petri dish. One cm diameter circles of gelatin were cut out, soaked in buffers of pH 4.0, 7.0 or 10.0 overnight, and then redeposited in their positions in the Petri dish. An array of six LEDs of equal light intensity were brought up to the bottom surface of the Petri dish so as to match the gelatin cut-outs. The LEDs were pulsed at 100 Hz and the photoeffects were recorded for each of the six areas of defined pH, as described previously. The alternating current photoresponse readings for pH 4 were 0.55, 0.68 volts; pH 7, 0.20, 0.18 volts; and pH 10, 0.02, 0.02 volts as peak-to-peak value. A solution in an electrode well was provided in the Petri dish to be in electrical communicating relationship with the gelatin and was 0.15M NaCl.

Construction of a multiplicity of channels or compartments adjacent to the wafer facilitates comparison of one or more "experimental" samples with one or more "reference" samples. Using the two-channel silicon wafer/garnet wafer device described previously, it is possible to monitor both channels on an essentially continuous basis through alternate illumination of the two sites described previously. The photoresponse as modified by the reference sample may be automatically subtracted from that modified by the experimental sample-by sinusoidally illuminating both channels continuously and 180 out of phase, and recording the amplitude of the alternating current using the circuit shown in FIG. 1, optionally with the reference and controlling electrodes shorted together. This technique has been used to monitor the growth of bacteria on the basis of their ability to reduce the pH of their surroundings. A nutrient solution comprising 0.85% NaCl, 0.75% glucose, and 0.25% peptone was used as the standard solution, and this nutrient medium containing 10.sup.7 /cc cells of E. coli prepared for comparison. At about the same time, the nutrient solution was passed through the standard channel and the bacterial suspension passed through the sample channel. After 20 min, it was noted that a substantial decrease in pH occurred as evidenced by a change in the output potential of alternating current meter 16 of 50 mV between 0 time and 20 min. Thus, the system could be employed to detect the presence of bacteria in a medium which should be otherwise free of bacteria, or by employing antibodies to particular microorganisms, one could provide for specific binding of the microorganisms followed by washing to remove non-specifically-bound microorganisms, and then determine whether there was any change in pH with time.

Similarly, the activity of an enzyme (penicillinase) which effects a pH reduction when it acts on its substrate (penicillin) was studied using the same technique. In this study, 10 .mu.l of a solution containing various concentrations (<5 units/ml) of penicillinass in PBS was combined with 1 ml of a 1 mg/ml penicillin G in 10.5 mM PO.sub.4, 0.15M NaCl, pH 8.3 solution, and the mixture contacted with the surface of the photoresponsive device. The reference solution contained no penicillinass. The circuit of FIG. 1 was employed, except that the reference electrode and controlling electrode were shorted together. The limit of detection was about 0.25 units/ml of penicillinass, based on changes in electrical response resulting from changes in pH. However, when introduced at high concentrations (approximately 5 units/ml), the penicillinase became bound to the surface, and the bound penicillinass could be used for the determination of the concentration of solutions of penicillin added subsequently. Denaturation and/or removal of the penicillinass could be achieved by treatment of the surface with 1N NaOH, followed by 1N HCl, followed by washing with PBS.

To demonstrate the use of the device to detect light-absorbing species in the illumination pathway, microscope slides were affixed to the garnet side of a silicon wafer/garnet wafer assembly using tape with adhesive on both sides. The tape was positioned in such a way that a second set of 7 .mu. deep channels were constructed (between the garnet and the microscope slides) which exactly overlaid the first set of channels (between the silicon and garnet wafers). The first set (adjacent to the silicon wafer) were filled with phosphate-buffered saline at pH 6.8. Various concentrations of a green dye, Schilling Food Color (a mixture of FD&C yellow #5 and FD&C blue #1) were prepared and used to sequentially fill the second set of channels. The applied potential required to maintain a constant time dependent photoresponse to illumination by LEDs with a 655 nm wavelength was recorded (FIG. 6). Application of Beer's law indicated that the applied potential was linearly related to the incident light at the surface of the silicon wafer and thus could be used to measure the concentration of a light-absorbing species in the illumination pathway. Comparison of these results with those given by a Beckmann Spectrophotometer indicated that the pathlength of the dye-containing channels had been 1 cm (rather than 70 .mu.) a change in concentration corresponding to an OD.sub.655nm =1.00 (as measured on the spectrophotometer) would have given an applied voltage charge of 90 mV as measured using the described device.

To demonstrate the use of the device for measuring the concentration of oxidizing (electron accepting) molecules and monitoring redox reactions, the following experiments were performed. Reversibility of the platinum electrode was facilitated as previously described and the silicon wafer/garnet wafer assembly (having two channels) was employed. A redox solution was prepared which was 0.033M Fe(CN).sub.6.sup.-4 Fe(CN).sub.6.sup.-3, 0.1M NaCl, 0.014M phosphate The redox solution was introduced into channels of the device described above. A plot of mvolts applied potential, in order to maintain a constant amplitude of alternating photocurrent, versus the log of the Fe.sup.+2 /Fe.sup.+3 concentration ratio was plotted and gave a straight line with a slope of 49 mV/unit (FIG. 7). As previously described for pH determination, the response generated at the illuminated site is modified by the redox solution in the channel adjacent to that site, with negligible interference produced by the solution with a different Fe.sup.+2 /Fe.sup.+3 value added to the parallel non-illuminated channel.

In further experiments, the substance methylene blue (MB) was used as an electron-transfer agent communicating with the silicon wafer. Unless stated otherwise, the MB was at 5 .mu.g/ml and the diluent was phosphate-buffered saline for these experiments. When MB at 5 .mu.g/ml is introduced into a channel of the silicon wafer/garnet wafer assembly a transient (-30 sec) applied potential signal of about -90 mV is recorded. If NADPH at 1 mg/ml has previously been mixed with the MB solution and left for about 5 min (in a sealed container which includes little air), the recorded transient signal is about -8 mV. Use of varying concentrations of NADPH has shown that measurement of NADPB concentration is possible by means of this technique.

It is also possible to measure the concentration of the enzyme, horseradish peroxidase (HRPO), by a similar technique. Using MB at 5 .mu.g/ml and H.sub.2 O.sub.2 at 0.15%, together with various concentrations of HRPO (0.005 to 50 .mu.g/ml), applied potential signals which were maintained at high values for several minutes were recorded. In a typical experiment, the maintained signal measured at 1 min after addition of the reagents to the device was -80 mV and -470 mV, respectively, for HRPO at 0.005 and 50 .mu.g/ml (with intermediate HRPO concentrations). In contrast, in the absence of HRPO, MB+H.sub.2 O.sub.2 produces a transient 30 sec signal characteristic of MB alone which decays to the baseline value by 1 min after addition to the device.

If MB is added to milk at a final concentration of 5 .mu.g/ml, and the mixture introduced into the device, an elevated applied potential signal is maintained rained for many minutes. The amplitude of this maintained signal is significantly reduced by the presence of E. coli growing in the milk. This indicates that bacterial growth may be monitored by such a method. The milk had not changed pH as monitored using a pH meter.

It is also possible to use a similar technique to measure the concentration of H.sub.2 O.sub.2. In an experiment designed to illustrate this, MB and HRPO were used together, each at 5 .mu.g/ml. Addition of H.sub.2 O.sub.2 (at various concentrations) prior to introduction of the mixtures to the device showed that the transient signal observed at 6 .mu.M H.sub.2 O.sub.2 (-150 mV) was about 50% greater than that observed in its absence (-90 mV). In the range 0-50 .mu.M H.sub.2 O.sub.2, transient signals are obtained with amplitudes which are approximately linear with H.sub.2 O.sub.2 concentration.

A similar technique has been used to assay glucose. In this case, glucose (at various concentration) was introduced to the enzyme glucose oxidass (GO) at 5 .mu.g/ml and left at room temperature for 40 min. At this time, MB and HRPO were added to give a final concentration of 5 .mu.g/ml of each substance and the solutions were sequentially introduced into the device. With 1.5 .mu.g/ml (-8 .mu.M) glucose the transient applied voltage signal was about 50% greater than that observed in its absence.

As evidenced above, assays can be performed for the substrates of such enzymes as cholesterol oxidass, galacross oxidass, uricass, xanthine oxidass, etc., to a level of better than 10 .mu.M, or the enzymes themselves may be the species assayed. While the enzymes indicated above are associated with H.sub.2 O.sub.2 formation, other enzymes not involving the formation of H.sub.2 O.sub.2 will also be assayable.

The photosignal from the redox pair is channel specific. Different redox compositions in different channels can be determined on a single monolithic surface, essentially simultaneously. It is also possible to measure one phenomenon in one channel, e.g., redox, and a different phenomenon in a different channel, e.g., pH.

It is evident from the above results that the subject devices and methods provide for an accurate, rapid and efficient method for measuring a wide variety of materials in a medium capable of modulating an electrical photoresponse. The subject device can be adapted to be used with liquids, gels and solid materials. The device can be used for measuring a large number of samples substantially simultaneously, employing rapid readouts, allowing for redundancy so as to ensure accurate results, and providing for concomitant standardization of determinations. The method can be used with a state (non-flowing) medium or a dynamic (flowing) medium. In addition, the method can be used for the determination of rates. Various types of separation techniques can be monitored or analyzed such as electrophoresis, Southern blots, plaque formation, or the like, where specific sites can be defined in accordance with variations in signals and position on a surface.

Although the foregoing invention has been described in some detail by way of illustration and example for purposes of clarity of understanding, it will be obvious that certain changes and modifications may be practiced within the scope of the appended claims. As but one example, while the foregoing specification refers to making a plurality of determinations at a plurality of sites, it will be appreciated that the teachings of this invention also apply to making determinations at a single site.

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