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| United States Patent | 8,087,297 |
| Ludwiczak | January 3, 2012 |
A system and a retrofit kit for removing debris from a surface of a material. At least one vibration subunit is provided which is either embedded within or operatively connected to a back surface of the material. The vibration subunits are capable of converting a driving energy to a vibrating mechanical output energy which is coupled to the material. At least one external energy source is provided which is operatively connected to the vibration subunits. The external energy source is capable of providing the driving energy to the vibration subunits. The vibrating mechanical energy is capable of causing debris to be removed from the surface of the material.
| Inventors: | Ludwiczak; Damian R. (Medina, OH) |
| Appl. No.: | 12/336,622 |
| Filed: | December 17, 2008 |
| Application Number | Filing Date | Patent Number | Issue Date | ||
| 11858680 | Sep., 2007 | 7770453 | |||
| 11461667 | Aug., 2006 | 7459831 | |||
| 10949613 | Aug., 2006 | 7084553 | |||
| 60550567 | Mar., 2004 | ||||
| Current U.S. Class: | 73/584 ; 310/321; 310/323.19; 73/600; 73/658 |
| Current International Class: | G01N 29/00 (20060101); H01L 41/083 (20060101) |
| Field of Search: | 73/583,584,579,600,602,658 310/323.01,328,321,323.19 |
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